Publication:

Direct CMP of high porosity ultra low-k materials

Date

2011
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorHeylen, Nancy
dc.contributor.imecauthorHeylen, Nancy
dc.date.accessioned2021-10-19T14:18:29Z
dc.date.available2021-10-19T14:18:29Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19074
dc.source.conferenceAdvanced Metallization Conference 21st Asian Session - ADMETA
dc.source.conferencedate12/09/2011
dc.source.conferencelocationTokyo Japan
dc.title

Direct CMP of high porosity ultra low-k materials

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations