Publication:
Applications of Raman spectroscopy in semiconductor processing.
Date
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-15T13:08:11Z | |
| dc.date.available | 2021-10-15T13:08:11Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8804 | |
| dc.source.beginpage | 139 | |
| dc.source.endpage | 142 | |
| dc.source.issue | 16 | |
| dc.source.journal | Future FAB International | |
| dc.title | Applications of Raman spectroscopy in semiconductor processing. | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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