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Piezoelectic harvesters and MEMS technology: fabrication, modeling and measurements

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dc.contributor.authorRenaud, Michael
dc.contributor.authorSterken, Tom
dc.contributor.authorSchmitz, Andreas
dc.contributor.authorFiorini, Paolo
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorPuers, Bob
dc.contributor.imecauthorSterken, Tom
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorPuers, Bob
dc.date.accessioned2021-10-16T19:01:00Z
dc.date.available2021-10-16T19:01:00Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12775
dc.source.beginpage891
dc.source.conferenceTransducers & Eurosensors '07: The 14th International Conference onSolid-State Sensors, Actuators and Microsystems
dc.source.conferencedate10/06/2007
dc.source.conferencelocationLyon France
dc.source.endpage894
dc.title

Piezoelectic harvesters and MEMS technology: fabrication, modeling and measurements

dc.typeProceedings paper
dspace.entity.typePublication
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