Publication:

Fully Flexible PMUT Based on Polymer Materials and Stress Compensation by Adaptive Frequency Driving

Date

2021
Journal article
https://doi.org/10.1109/JMEMS.2020.3043052
Simple item page Full metadata Statistics
 
dc.contributor.authorJeong, Yongbin
dc.contributor.authorGenoe, Jan
dc.contributor.authorGijsenbergh, Pieter
dc.contributor.authorSegers, Jeremy
dc.contributor.authorHeremans, Paul
dc.contributor.authorCheyns, David
dc.contributor.imecauthorJeong, Yongbin
dc.contributor.imecauthorGenoe, Jan
dc.contributor.imecauthorGijsenbergh, Pieter
dc.contributor.imecauthorSegers, Jeremy
dc.contributor.imecauthorHeremans, Paul L.
dc.contributor.imecauthorCheyns, David
dc.contributor.imecauthorHeremans, Paul
dc.contributor.orcidimecJeong, Yongbin::0000-0002-0311-6629
dc.contributor.orcidimecGenoe, Jan::0000-0002-4019-5979
dc.contributor.orcidimecGijsenbergh, Pieter::0000-0003-0135-6968
dc.contributor.orcidimecCheyns, David::0000-0002-1327-8752
dc.contributor.orcidimecHeremans, Paul::0000-0003-2151-1718
dc.date.accessioned2021-11-17T09:49:45Z
dc.date.available2021-11-02T16:06:16Z
dc.date.available2021-11-03T19:10:45Z
dc.date.available2021-11-17T09:49:45Z
dc.date.issued2021
dc.identifier.doi10.1109/JMEMS.2020.3043052
dc.identifier.issn1057-7157
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38262
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.beginpage137
dc.source.endpage143
dc.source.issue1
dc.source.journalJOURNAL OF MICROELECTROMECHANICAL SYSTEMS
dc.source.numberofpages7
dc.source.volume30
dc.title

Fully Flexible PMUT Based on Polymer Materials and Stress Compensation by Adaptive Frequency Driving

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles