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Book chapters
Nanoporous dielectric materials for advanced micro- and nanoelectronics
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Nanoporous dielectric materials for advanced micro- and nanoelectronics
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Date
2012
Book Chapter
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23174.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Baklanov, Mikhaïl
Journal
Abstract
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1890
since deposited on 2021-10-20
Acq. date: 2025-12-15
Citations
Metrics
Views
1890
since deposited on 2021-10-20
Acq. date: 2025-12-15
Citations