Publication:
S-shaped double-spring structures for high stiffness and spring height
Date
| dc.contributor.author | Hantschel, Thomas | |
| dc.contributor.author | Chow, E.M. | |
| dc.contributor.imecauthor | Hantschel, Thomas | |
| dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
| dc.date.accessioned | 2021-10-20T11:26:51Z | |
| dc.date.available | 2021-10-20T11:26:51Z | |
| dc.date.issued | 2012 | |
| dc.identifier.issn | 0167-9317 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20775 | |
| dc.source.beginpage | 231 | |
| dc.source.endpage | 234 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 2012 | |
| dc.title | S-shaped double-spring structures for high stiffness and spring height | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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