Publication:

An auto-adhesion model for MEMS surfaces taking into account the effect of surface roughness

Date

2000
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorPuers, Bob
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-14T14:04:32Z
dc.date.available2021-10-14T14:04:32Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4856
dc.source.beginpage104
dc.source.conferenceMaterials and Device Characterization in Micromachining III
dc.source.conferencedate17/09/2000
dc.source.conferencelocationSanta Clara, CA USA
dc.source.endpage112
dc.title

An auto-adhesion model for MEMS surfaces taking into account the effect of surface roughness

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions