Publication:

SOI photonic crystal fabrication using deep UV lithography

Date

2001
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorBogaerts, Wim
dc.contributor.authorTaillaert, Dirk
dc.contributor.authorBaets, Roel
dc.contributor.authorWiaux, Vincent
dc.contributor.authorBeckx, Stephan
dc.contributor.authorMaenhoudt, Mireille
dc.contributor.authorVandenberghe, Geert
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorBaets, Roel
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.accessioned2021-10-14T16:38:16Z
dc.date.available2021-10-14T16:38:16Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5082
dc.source.conference3rd Workshop on Photonic and Electromagnetic Crystal Structures (PECS 3)
dc.source.conferencedate9/06/2001
dc.source.conferencelocationSt. Andrews UK
dc.title

SOI photonic crystal fabrication using deep UV lithography

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions