Effect of downstream plasma treatment on dissolution of fluorocarbon polymer in organic solvents

dc.contributor.author	Le, Quoc Toan
dc.contributor.author	Kesters, Els
dc.contributor.author	Devonport, Joshua
dc.contributor.author	Holsteyns, Frank
dc.contributor.author	De Gendt, Stefan
dc.contributor.imecauthor	Le, Quoc Toan
dc.contributor.imecauthor	Kesters, Els
dc.contributor.imecauthor	Holsteyns, Frank
dc.contributor.imecauthor	De Gendt, Stefan
dc.contributor.orcidimec	Le, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimec	De Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned	2021-10-22T02:53:04Z
dc.date.available	2021-10-22T02:53:04Z
dc.date.issued	2014
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/24107
dc.identifier.url	http://www.scientific.net/SSP.219.197
dc.source.beginpage	197
dc.source.conference	Ultra Clean Processing of Semiconductor Surfaces - UCPSS
dc.source.conferencedate	21/09/2014
dc.source.conferencelocation	Brussels Belgium
dc.source.endpage	200
dc.title	Effect of downstream plasma treatment on dissolution of fluorocarbon polymer in organic solvents
dc.type	Proceedings paper
dspace.entity.type	Publication
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