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Nucleation and growth dependence of ALD WNC on substrate surface condition
Publication:
Nucleation and growth dependence of ALD WNC on substrate surface condition
Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Abell, Thomas
;
Schuhmacher, Jörg
;
Travaly, Youssef
;
Maex, Karen
Journal
Abstract
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1
since deposited on 2021-10-15
Acq. date: 2025-10-23
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1952
since deposited on 2021-10-15
Acq. date: 2025-10-23
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Metrics
Downloads
1
since deposited on 2021-10-15
Acq. date: 2025-10-23
Views
1952
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations