Publication:

Controlled and Uniform Wet Etching of Molybdenum Nanowires

Date

2023-09
Proceedings Paper
https://doi.org/10.4028/p-c36cTY
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dc.contributor.authorDeng, Kerong
dc.contributor.authorErofeev, Ivan
dc.contributor.authorRay Chowdhuri, Angshuman
dc.contributor.authorSaidov, Khakimjon
dc.contributor.authorAabdin, Zainul
dc.contributor.authorPacco, Antoine
dc.contributor.authorPhilipsen, Harold
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorVinh Huynh, Han
dc.contributor.authorMirsaidov, Utkur
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecPacco, Antoine::0000-0001-6330-5053
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.contributor.orcidimecHolsteyns, Frank::0009-0002-2123-452X
dc.date.accessioned2024-02-05T13:03:01Z
dc.date.available2023-09-06T07:04:17Z
dc.date.available2024-02-05T13:03:01Z
dc.date.embargo9999-12-31
dc.date.issued2023-09
dc.identifier.doihttps://doi.org/10.4028/p-c36cTY
dc.identifier.issn1012-0394
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42472
dc.publisherScientific.Net
dc.source.beginpage351
dc.source.conference16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2023)
dc.source.conferencedateSeptember 2023
dc.source.conferencelocationBrugge
dc.source.endpage355
dc.source.journalSolid State Phenomena Vol. 346
dc.source.numberofpages5
dc.subject.disciplineMaterials science
dc.subject.keywordswet chemical etching
dc.subject.keywordsmolybdenum (Mo)
dc.title

Controlled and Uniform Wet Etching of Molybdenum Nanowires

dc.typeProceedings paper
dspace.entity.typePublication
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