Publication:

CMOS compatible polycrystalline silicon-germanium based pressure sensors

Date

2012
Journal article
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dc.contributor.authorGonzalez, Pilar
dc.contributor.authorGuo, Bin
dc.contributor.authorRakowski, Michal
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorWitvrouw, Ann
dc.contributor.imecauthorGonzalez, Pilar
dc.contributor.imecauthorRakowski, Michal
dc.contributor.imecauthorDe Meyer, Kristin
dc.date.accessioned2021-10-20T11:15:57Z
dc.date.available2021-10-20T11:15:57Z
dc.date.issued2012
dc.identifier.issn0924-4247
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20737
dc.identifier.urlhttp://dx.doi.org/10.1016/j.sna.2011.12.018
dc.source.beginpage9
dc.source.endpage18
dc.source.journalSensors and Actuators A: Physical
dc.source.volume188
dc.title

CMOS compatible polycrystalline silicon-germanium based pressure sensors

dc.typeJournal article
dspace.entity.typePublication
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