Publication:

Effect of nitrogen doping on the structure of metastable /3-W on SiO2

Date

2021
Journal article
https://doi.org/10.1016/j.tsf.2021.138795
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dc.contributor.authorHon, K.
dc.contributor.authorCouet, Sebastien
dc.contributor.authorVudya Sethu, Kiran Kumar
dc.contributor.authorSwerts, Johan
dc.contributor.authorKar, Gouri Sankar
dc.contributor.imecauthorCouet, Sebastien
dc.contributor.imecauthorVudya Sethu, Kiran Kumar
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorCouet, Sebastien
dc.contributor.imecauthorVudya Sethu, Kiran Kumar
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.orcidimecCouet, Sebastien::0000-0001-6436-9593
dc.date.accessioned2021-12-15T11:23:09Z
dc.date.available2021-11-02T15:59:57Z
dc.date.available2021-12-15T11:23:09Z
dc.date.issued2021
dc.identifier.doi10.1016/j.tsf.2021.138795
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37800
dc.publisherELSEVIER SCIENCE SA
dc.source.issuena
dc.source.journalTHIN SOLID FILMS
dc.source.numberofpages6
dc.source.volume732
dc.subject.keywordsBETA-W
dc.subject.keywordsPHASE-TRANSFORMATION
dc.subject.keywordsTUNGSTEN FILMS
dc.subject.keywordsTHIN-FILMS
dc.subject.keywordsRESISTIVITY
dc.title

Effect of nitrogen doping on the structure of metastable /3-W on SiO2

dc.typeJournal article
dspace.entity.typePublication
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