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Conference contributions
Physical characterization of the metal/high-k layer interaction upon annealing
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Physical characterization of the metal/high-k layer interaction upon annealing
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Date
2008
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16547.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Conard, Thierry
;
Franquet, Alexis
;
Vandervorst, Wilfried
;
Reading, M.
;
van den Berg, J.A.
;
Van Elshocht, Sven
;
Schram, Tom
;
Adelmann, Christoph
;
De Gendt, Stefan
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1876
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations
Metrics
Views
1876
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations