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Stress variation across arrays of lines and its influence on LOCOS oxidation
Publication:
Stress variation across arrays of lines and its influence on LOCOS oxidation
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Date
1995
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Wolf, Ingrid
;
Rooyackers, Rita
;
Maes, Herman
Journal
Microelectronic Engineering
Abstract
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2003
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-16
Citations
Metrics
Views
2003
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-16
Citations