Publication:
EB metrology of Ge channel gate-all-around FET: buckling evaluation and EB damage assessment
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2048 since deposited on 2021-10-29
1last month
Acq. date: 2026-05-02
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Statistics
Views
2048 since deposited on 2021-10-29
1last month
Acq. date: 2026-05-02
Citations