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EB metrology of Ge channel gate-all-around FET: buckling evaluation and EB damage assessment
Publication:
EB metrology of Ge channel gate-all-around FET: buckling evaluation and EB damage assessment
Date
2020
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ohashi, Takeyoshi
;
Hasumi, Kazuhisa
;
Ikota, Masami
;
Lorusso, Gian
;
Witters, Liesbeth
;
Horiguchi, Naoto
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2045
since deposited on 2021-10-29
Acq. date: 2025-10-23
Citations
Metrics
Views
2045
since deposited on 2021-10-29
Acq. date: 2025-10-23
Citations