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Pulsed force-scanning spreading resistance microscopy (PF-SSRM) for high spatial resolution 2D-dopant profiling
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Pulsed force-scanning spreading resistance microscopy (PF-SSRM) for high spatial resolution 2D-dopant profiling
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Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Eyben, Pierre
;
Fouchier, Marc
;
Albart, P.
;
Charon-Verstappen, J.
;
Vandervorst, Wilfried
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1984
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Acq. date: 2025-12-15
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Views
1984
since deposited on 2021-10-14
1
last month
1
last week
Acq. date: 2025-12-15
Citations