Publication:

Small target compatible dimensional and analytical metrology for semiconductor nanostructures using X-ray fluorescence techniques

Date

2023
Proceedings Paper
https://doi.org/10.1117/12.2657963
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dc.contributor.authorHoenicke, Philipp
dc.contributor.authorKayser, Yves
dc.contributor.authorSoltwisch, Victor
dc.contributor.authorWaehlish, Andre
dc.contributor.authorWauschkuhn, Nils
dc.contributor.authorScheerder, Jeroen
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorCharley, Anne-Laure
dc.contributor.authorVeloso, Anabela
dc.contributor.authorLoo, Roger
dc.contributor.authorMertens, Hans
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorSiefke, Thomas
dc.contributor.authorAndrle, Anna
dc.contributor.authorGwalt, Grzegorz
dc.contributor.authorSiewert, Frank
dc.contributor.authorCiesielski, Richard
dc.contributor.authorBeckhoff, Burkhard
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorCharley, Anne-Laure
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorScheerder, Jeroen
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecCharley, Anne-Laure::0000-0003-4745-0167
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecMertens, Hans::0000-0002-3392-6892
dc.contributor.orcidimecScheerder, Jeroen::0000-0002-9301-0392
dc.date.accessioned2023-12-18T11:35:16Z
dc.date.available2023-07-28T17:40:05Z
dc.date.available2023-12-18T11:35:16Z
dc.date.issued2023
dc.description.wosFundingTextThis project has received funding from the ECSEL Joint Undertaking (JU) under grant agreement No 875999-IT2 and No. 826589-MADEin4. The JU receives support from the European Union's Horizon 2020 research and innovation programme and the Netherlands, Belgium, Germany, France, Austria, Hungary, the United Kingdom, Romania and Israel.
dc.identifier.doi10.1117/12.2657963
dc.identifier.eisbn978-1-5106-6100-4
dc.identifier.isbn978-1-5106-6099-1
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42243
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVII
dc.source.conferencedateFEB 27-MAR 02, 2023
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages7
dc.source.volume12496
dc.subject.keywordsQUANTIFICATION
dc.title

Small target compatible dimensional and analytical metrology for semiconductor nanostructures using X-ray fluorescence techniques

dc.typeProceedings paper
dspace.entity.typePublication
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