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Can we increase the efficiency of organic contamination removal by ozone/di-water processes by using additives
Publication:
Can we increase the efficiency of organic contamination removal by ozone/di-water processes by using additives
Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Smedt, Frank
;
Vankerckhoven, Hans
;
De Gendt, Stefan
;
Heyns, Marc
;
Vinckier, Chris
Journal
Abstract
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1934
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1934
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations