Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Presentations
Can we increase the efficiency of organic contamination removal by ozone/di-water processes by using additives
Publication:
Can we increase the efficiency of organic contamination removal by ozone/di-water processes by using additives
Copy permalink
Date
2002
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Smedt, Frank
;
Vankerckhoven, Hans
;
De Gendt, Stefan
;
Heyns, Marc
;
Vinckier, Chris
Journal
Abstract
Description
Metrics
Views
1939
since deposited on 2021-10-14
1
last month
Acq. date: 2026-01-07
Citations
Metrics
Views
1939
since deposited on 2021-10-14
1
last month
Acq. date: 2026-01-07
Citations