Publication:
Electroless copper deposition on TiN
Date
| dc.contributor.author | Min, Woo Sig | |
| dc.contributor.author | Palmans, Roger | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Lee, D. N. | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-09-30T09:18:30Z | |
| dc.date.available | 2021-09-30T09:18:30Z | |
| dc.date.issued | 1997 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2026 | |
| dc.source.conference | 1997 Joint International Meeting ECS (Electrochemical Society) and ISE (International Society of Electrochemistry) : Symposium o | |
| dc.source.conferencelocation | ||
| dc.title | Electroless copper deposition on TiN | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |