Effect of elastic constants on the stresses in stripes and substrates: a 2D FE calculation

dc.contributor.author	Jain, Suresh
dc.contributor.author	Pinardi, Kuntjoro
dc.contributor.author	Maes, Herman
dc.contributor.author	Van Overstraeten, Roger
dc.contributor.author	Willander, M.
dc.date.accessioned	2021-09-30T12:15:51Z
dc.date.available	2021-09-30T12:15:51Z
dc.date.embargo	9999-12-31
dc.date.issued	1998
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/2649
dc.source.beginpage	864
dc.source.endpage	870
dc.source.issue	8
dc.source.journal	Semiconductor Science and Technology
dc.source.volume	13
dc.title	Effect of elastic constants on the stresses in stripes and substrates: a 2D FE calculation
dc.type	Journal article
dspace.entity.type	Publication
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