Publication:
Platinum template layer for texture control in PZT fecaps with reactively sputtered RuO2 electrode layers
Date
| dc.contributor.author | Norga, Gerd | |
| dc.contributor.author | Wouters, Dirk | |
| dc.contributor.author | Maes, Herman | |
| dc.date.accessioned | 2021-09-30T09:21:33Z | |
| dc.date.available | 2021-09-30T09:21:33Z | |
| dc.date.issued | 1997 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2062 | |
| dc.source.conference | Materials Research Society 1997 Fall Meeting : Symposium on Ferroelectric Thin Films VI | |
| dc.source.conferencedate | 30/11/1997 | |
| dc.source.conferencelocation | Boston, MA USA | |
| dc.title | Platinum template layer for texture control in PZT fecaps with reactively sputtered RuO2 electrode layers | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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