Publication:
Metal gate work function engineering for future CMOS technology node
Date
| dc.contributor.author | Lima, Lucas Petersen Barbosa | |
| dc.contributor.thesisadvisor | Diniz, Jose | |
| dc.contributor.thesisadvisor | De Gendt, Stefan | |
| dc.date.accessioned | 2021-10-22T20:36:16Z | |
| dc.date.available | 2021-10-22T20:36:16Z | |
| dc.date.issued | 2015-08 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25561 | |
| dc.identifier.url | https://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS1723954&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US | |
| dc.title | Metal gate work function engineering for future CMOS technology node | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
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