Publication:
Requirements of PECVD SiNx:H layers for bulk passivation of mc-Si
Date
| dc.contributor.author | Dekkers, Harold | |
| dc.contributor.author | De Wolf, Stefaan | |
| dc.contributor.author | Agostinelli, Guido | |
| dc.contributor.author | Duerinckx, Filip | |
| dc.contributor.author | Beaucarne, Guy | |
| dc.contributor.imecauthor | Dekkers, Harold | |
| dc.contributor.imecauthor | Duerinckx, Filip | |
| dc.contributor.orcidimec | Dekkers, Harold::0000-0003-4778-5709 | |
| dc.contributor.orcidimec | Duerinckx, Filip::0000-0003-2570-7371 | |
| dc.date.accessioned | 2021-10-15T13:11:39Z | |
| dc.date.available | 2021-10-15T13:11:39Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8827 | |
| dc.source.beginpage | 639 | |
| dc.source.conference | Technical Digest of the 14th International Photovoltaic Science and Engineering Conference - PVSEC-14 | |
| dc.source.conferencedate | 26/01/2004 | |
| dc.source.conferencelocation | Bangkok Thailand | |
| dc.source.endpage | 640 | |
| dc.title | Requirements of PECVD SiNx:H layers for bulk passivation of mc-Si | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |