Publication:

Impact of halo implant on the hot carrier reliability of germanium pMOSFETs

Date

2011
Journal article
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dc.contributor.authorFranco, Jacopo
dc.contributor.authorEneman, Geert
dc.contributor.authorKaczer, Ben
dc.contributor.authorMitard, Jerome
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.date.accessioned2021-10-19T13:35:47Z
dc.date.available2021-10-19T13:35:47Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18924
dc.source.beginpage01A804
dc.source.issue1
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume29
dc.title

Impact of halo implant on the hot carrier reliability of germanium pMOSFETs

dc.typeJournal article
dspace.entity.typePublication
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