Low-energy heavy-ion TOF-ERDA setup for quantitative depth profiling of thin films

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Author(s)

Giangrandi, Simone

;

Sajavaara, Timo

;

;

;

Vantomme, Andre

;

Vandervorst, Wilfried

Journal

Nuclear Instruments and Methods in Physics Research B

Metrics

1957 since deposited on 2021-10-17

Acq. date: 2025-12-08