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Low-energy heavy-ion TOF-ERDA setup for quantitative depth profiling of thin films
Publication:
Low-energy heavy-ion TOF-ERDA setup for quantitative depth profiling of thin films
Date
2008
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Giangrandi, Simone
;
Sajavaara, Timo
;
Brijs, Bert
;
Arstila, Kai
;
Vantomme, Andre
;
Vandervorst, Wilfried
Journal
Nuclear Instruments and Methods in Physics Research B
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1954
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1954
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations