Publication:
Room temperature and zero pressure high quality oxide direct bonding for 3D self-aligned assembly
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1934 since deposited on 2021-10-22
Acq. date: 2025-12-15
Citations
Metrics
Views
1934 since deposited on 2021-10-22
Acq. date: 2025-12-15
Citations