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Conference contributions
The fabrication of a full metal AFM probe and its applications for Si and InP devices analysis
Publication:
The fabrication of a full metal AFM probe and its applications for Si and InP devices analysis
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Date
1999
Proceedings Paper
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3452.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hantschel, Thomas
;
Trenkler, Thomas
;
Xu, Mingwei
;
Vandervorst, Wilfried
Journal
Abstract
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1835
since deposited on 2021-10-06
1
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Acq. date: 2025-12-15
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Metrics
Views
1835
since deposited on 2021-10-06
1
last month
Acq. date: 2025-12-15
Citations