Publication:

Ni fully silicided gates for 45 nm CMOS applications

Date

2005

Journal article

Simple item page Full metadata Statistics

Files

10710.pdf 1.41 MB

Author(s)

;

;

Kmieciak, Malgorzata

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;

Veloso, Anabela

;

Kottantharayil, Anil

;

Pourtois, Geoffrey

;

Demeurisse, Caroline

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;

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de Potter de ten Broeck, Muriel

;

Vrancken, Christa

;

Journal

Microelectronic Engineering

Statistics

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Acq. date: 2026-08-03