Publication:
Ultra shallow junctions formed by sub-melt laser annealing
Date
| dc.contributor.author | Falepin, Annelies | |
| dc.contributor.author | Janssens, Tom | |
| dc.contributor.author | Severi, Simone | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Felch, S.B. | |
| dc.contributor.author | Parihar, V. | |
| dc.contributor.author | Mayur, A. | |
| dc.contributor.imecauthor | Falepin, Annelies | |
| dc.contributor.imecauthor | Severi, Simone | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-16T01:33:52Z | |
| dc.date.available | 2021-10-16T01:33:52Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10449 | |
| dc.source.beginpage | 87 | |
| dc.source.conference | 13th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP | |
| dc.source.conferencedate | 4/10/2005 | |
| dc.source.conferencelocation | Santa Barbara, CA USA | |
| dc.source.endpage | 91 | |
| dc.title | Ultra shallow junctions formed by sub-melt laser annealing | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |