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Conference contributions
Barrier deposition on porous low-k films
Publication:
Barrier deposition on porous low-k films
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Date
2003
Proceedings Paper
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8138.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Shamiryan, Denis
;
Yanovitskaya, Z.S.
;
Iacopi, Francesca
;
Maex, Karen
Journal
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1965
since deposited on 2021-10-15
Acq. date: 2025-12-10
Citations
Metrics
Views
1965
since deposited on 2021-10-15
Acq. date: 2025-12-10
Citations