Publication:
The effects of geometry and chemistry of nanopatterned substrates on the directed self assembly of block copolymers
Date
| dc.contributor.author | Garner, Grant | |
| dc.contributor.author | Williamson, L. | |
| dc.contributor.author | Seidel, R. | |
| dc.contributor.author | Hur, S. | |
| dc.contributor.author | de Pablo, J. | |
| dc.contributor.author | Rincon Delgadillo, Paulina | |
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.imecauthor | Rincon Delgadillo, Paulina | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.date.accessioned | 2021-10-22T19:18:55Z | |
| dc.date.available | 2021-10-22T19:18:55Z | |
| dc.date.issued | 2015 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25288 | |
| dc.identifier.url | http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2245964 | |
| dc.source.beginpage | 94231K | |
| dc.source.conference | Alternative Lithographic Technologies VII | |
| dc.source.conferencedate | 22/02/2015 | |
| dc.source.conferencelocation | san Jose, CA USA | |
| dc.title | The effects of geometry and chemistry of nanopatterned substrates on the directed self assembly of block copolymers | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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