Publication:

Towards reduced impact of EUV mask defectivity on wafer

Date

2014-07

Proceedings Paper

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Author(s)

Jonckheere, Rik

;

Van Den Heuvel, Dieter

;

;

Pollentier, Ivan

;

Baudemprez, Bart

;

Jehoul, Christiane

;

;

Hendrickx, Eric

Metrics

1895 since deposited on 2021-10-22

Acq. date: 2025-12-15