Publication:

High sputter bias super secondary grain initiation (in structures)

Date

2007
Proceedings Paper
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dc.contributor.authorVanstreels, Kris
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorD'Haen, Jan
dc.contributor.authorDemuynck, Steven
dc.contributor.authorDe Ceuninck, Ward
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorDe Ceuninck, Ward
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.accessioned2021-10-16T21:11:44Z
dc.date.available2021-10-16T21:11:44Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13144
dc.source.beginpage97
dc.source.conferenceAdvanced Metallization Conference 2006 - AMC 2006
dc.source.conferencedate17/10/2006
dc.source.conferencelocationSan Diego, CA USA
dc.source.endpage103
dc.title

High sputter bias super secondary grain initiation (in structures)

dc.typeProceedings paper
dspace.entity.typePublication
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