Publication:
Poly-SiGe, a superb material for MEMS
Date
| dc.contributor.author | Witvrouw, Ann | |
| dc.date.accessioned | 2021-10-15T07:49:25Z | |
| dc.date.available | 2021-10-15T07:49:25Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8405 | |
| dc.source.conference | MRS Fall Meeting Symposium A: Micro- and Nanosystems | |
| dc.source.conferencedate | 1/12/2003 | |
| dc.source.conferencelocation | Boston, MA USA | |
| dc.title | Poly-SiGe, a superb material for MEMS | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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