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CMOS integration of high-k/metal gate transistors in diffusion and gate replacement (D&GR) scheme for dynamic random access memory peripheral circuits
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CMOS integration of high-k/metal gate transistors in diffusion and gate replacement (D&GR) scheme for dynamic random access memory peripheral circuits
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Date
2018
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Dentoni Litta, Eugenio
;
Ritzenthaler, Romain
;
Schram, Tom
;
Spessot, Alessio
;
O'Sullivan, Barry
;
Machkaoutsan, Vladimir
;
Fazan, Pierre
;
Ji, Yunhyuck
;
Mannaert, Geert
;
Lorant, Christophe
;
Sebaai, Farid
;
Thiam, Arame
;
Ercken, Monique
;
Demuynck, Steven
;
Horiguchi, Naoto
Journal
Japanese Journal of Applied Physics
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2018
since deposited on 2021-10-25
2
last month
Acq. date: 2025-12-15
Citations
Metrics
Views
2018
since deposited on 2021-10-25
2
last month
Acq. date: 2025-12-15
Citations