Publication:
Sustainable treatment of HF-containing wastewafers with a crystalactor
Date
| dc.contributor.author | Van den Broeck, Kristel | |
| dc.contributor.author | Van Hoornick, Nausikaa | |
| dc.contributor.author | Van Hoeymissen, Jan | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.author | de Boer, R. | |
| dc.contributor.author | Giesen, A. | |
| dc.contributor.imecauthor | Van Hoornick, Nausikaa | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.date.accessioned | 2021-10-14T23:31:23Z | |
| dc.date.available | 2021-10-14T23:31:23Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6923 | |
| dc.source.conference | 9th International Semiconductor Environment Safety and Health Conference | |
| dc.source.conferencedate | 9/06/2002 | |
| dc.source.conferencelocation | San Diego, CA USA | |
| dc.title | Sustainable treatment of HF-containing wastewafers with a crystalactor | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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