Publication:
Stress measurements in shallow trench isolation using μ-Raman spectroscopy
Date
| dc.contributor.advisor | test3 | |
| dc.contributor.author | Dombrowski, Kai | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-09-30T11:53:39Z | |
| dc.date.available | 2021-09-30T11:53:39Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2556 | |
| dc.source.beginpage | 519 | |
| dc.source.conference | Beam Injection Assessment of Defects in Semiconductors. 5th International Workshop (BIADS 98).; 30 Aug. - 3 Sept. 1998; Wulkow, | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 524 | |
| dc.title | Stress measurements in shallow trench isolation using μ-Raman spectroscopy | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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