Publication:
RF MEMS reliability - The challenge, the physics, and the reward
Date
| dc.contributor.author | van Spengen, Merlijn | |
| dc.date.accessioned | 2021-10-15T17:14:30Z | |
| dc.date.available | 2021-10-15T17:14:30Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2004-09 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9792 | |
| dc.source.beginpage | 319 | |
| dc.source.conference | 15th Micromechanics Workshop - MME | |
| dc.source.conferencedate | 5/09/2004 | |
| dc.source.conferencelocation | Leuven Belgium | |
| dc.source.endpage | 325 | |
| dc.title | RF MEMS reliability - The challenge, the physics, and the reward | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |