Publication:
Top-coats for scalable Nano-manufacturing with High-chi Block Copolymers in Lithographic Applications
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235 since deposited on 2023-06-20
Acq. date: 2025-10-23
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1141 since deposited on 2023-06-20
Acq. date: 2025-10-23
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235 since deposited on 2023-06-20
Acq. date: 2025-10-23
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1141 since deposited on 2023-06-20
Acq. date: 2025-10-23
Citations