Publication:
Double patterning lithography: reducing the cost
Date
| dc.contributor.author | Miller, Andy | |
| dc.contributor.author | Provoost, Jan | |
| dc.contributor.author | Maenhoudt, Mireille | |
| dc.contributor.imecauthor | Miller, Andy | |
| dc.contributor.imecauthor | Provoost, Jan | |
| dc.date.accessioned | 2021-10-18T00:48:10Z | |
| dc.date.available | 2021-10-18T00:48:10Z | |
| dc.date.issued | 2009 | |
| dc.identifier.issn | 1363-5182 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15861 | |
| dc.source.beginpage | 66 | |
| dc.source.endpage | 70 | |
| dc.source.issue | 29 | |
| dc.source.journal | Future Fab International | |
| dc.title | Double patterning lithography: reducing the cost | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |