Publication:
Synthesis and characterisation of zeolitic films for low-k dielectric application
Date
| dc.contributor.author | Eslava Fernandez, Salvador | |
| dc.contributor.thesisadvisor | Kirschhock, C.E.A. | |
| dc.contributor.thesisadvisor | Maex, Karen | |
| dc.date.accessioned | 2021-10-17T22:08:09Z | |
| dc.date.available | 2021-10-17T22:08:09Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2009-01 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15283 | |
| dc.title | Synthesis and characterisation of zeolitic films for low-k dielectric application | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |