Publication:

Co-integration Process Compatible Input/Output (I/O) Device Options for GAA Nanosheet Technology

Date

2022
Proceedings Paper
https://doi.org/10.1109/ESSDERC55479.2022.9947139
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dc.contributor.authorGaddemane, Gautam
dc.contributor.authorBhuwalka, Krishna K.
dc.contributor.authorMatagne, Philippe
dc.contributor.authorRzepa, Gerhard
dc.contributor.authorVan de Put, Maarten
dc.contributor.authorSantermans, Sybren
dc.contributor.authorBaumgartner, Oskar
dc.contributor.authorWu, Hao
dc.contributor.authorHellings, Geert
dc.contributor.imecauthorGaddemane, Gautam
dc.contributor.imecauthorMatagne, Philippe
dc.contributor.imecauthorVan de Put, Maarten
dc.contributor.imecauthorSantermans, Sybren
dc.contributor.imecauthorHellings, Geert
dc.contributor.orcidimecSantermans, Sybren::0000-0002-0843-102X
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecVan de Put, Maarten::0000-0001-9179-6443
dc.date.accessioned2023-04-26T09:27:27Z
dc.date.available2023-02-09T03:20:56Z
dc.date.available2023-02-17T13:24:55Z
dc.date.available2023-04-26T09:27:27Z
dc.date.issued2022
dc.identifier.doi10.1109/ESSDERC55479.2022.9947139
dc.identifier.eisbn978-1-6654-8497-8
dc.identifier.issn1930-8876
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41072
dc.publisherIEEE
dc.source.beginpage265
dc.source.conference52nd IEEE European Solid-State Device Research Conference (ESSDERC)
dc.source.conferencedateSEP 19-22, 2022
dc.source.conferencelocationMilan
dc.source.endpage268
dc.source.journalna
dc.source.numberofpages4
dc.title

Co-integration Process Compatible Input/Output (I/O) Device Options for GAA Nanosheet Technology

dc.typeProceedings paper
dspace.entity.typePublication
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