Publication:

Effect of device density on the uniformity of silicon nano-photonic waveguide devices

Date

2009
Proceedings Paper
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dc.contributor.authorSelvaraja, Shankar
dc.contributor.authorDe Vos, Katrien
dc.contributor.authorBogaerts, Wim
dc.contributor.authorBienstman, Peter
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorBienstman, Peter
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecBienstman, Peter::0000-0001-6259-464X
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.accessioned2021-10-18T02:51:23Z
dc.date.available2021-10-18T02:51:23Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16195
dc.source.beginpage311
dc.source.conference22nd Annual Meeting of the IEEE Photonics Society
dc.source.conferencedate4/10/2009
dc.source.conferencelocationBelek-Antalya Turkey
dc.source.endpage311
dc.title

Effect of device density on the uniformity of silicon nano-photonic waveguide devices

dc.typeProceedings paper
dspace.entity.typePublication
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