Publication:

N-type polycrystalline silicon films formed on alumina by aluminium induced crystallization and overdoping

Date

 
dc.contributor.authorTüzün, Ö.
dc.contributor.authorSlaoui, A.
dc.contributor.authorGordon, Ivan
dc.contributor.authorFocsa, A.
dc.contributor.authorBallutaud, D.
dc.contributor.authorBeaucarne, Guy
dc.contributor.authorPoortmans, Jef
dc.contributor.imecauthorGordon, Ivan
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecGordon, Ivan::0000-0002-0713-8403
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.accessioned2021-10-17T11:26:30Z
dc.date.available2021-10-17T11:26:30Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14583
dc.source.beginpage6892
dc.source.endpage6895
dc.source.issue20
dc.source.journalThin Solid Films
dc.source.volume516
dc.title

N-type polycrystalline silicon films formed on alumina by aluminium induced crystallization and overdoping

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
17310.pdf
Size:
552.11 KB
Format:
Adobe Portable Document Format
Publication available in collections: