Publication:

Comparison between existing inspection techniques for EUV mask defects

Date

2010

Proceedings Paper

Simple item page Full metadata Statistics

Files

20883.pdf 1.6 MB

Author(s)

Van Den Heuvel, Dieter

;

Jonckheere, Rik

;

Hendrickx, Eric

;

;

;

;

;

Statistics

1923 since deposited on 2021-10-18

Acq. date: 2026-01-26