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High resolution analysis of high concentration dopant profiles
Publication:
High resolution analysis of high concentration dopant profiles
Date
2011
Presentation
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23186.pdf
195.61 KB
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Koelling, Sebastian
;
Zschaetzsch, Gerd
;
Douhard, Bastien
;
Kimura, K
;
Buyuklimanli, T.
;
Vandervorst, Wilfried
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1908
since deposited on 2021-10-19
Acq. date: 2025-12-09
Citations
Metrics
Views
1908
since deposited on 2021-10-19
Acq. date: 2025-12-09
Citations