Visualizing anisotropy in the surface oxidation of germanium by wet etching of patterned nanowedges: proof of concept

dc.contributor.author	Abrenica, Graniel
dc.contributor.author	Lebedev, Mikhail
dc.contributor.author	Pacco, Antoine
dc.contributor.author	Calvet, Wolfram
dc.contributor.author	Mayer, Thomas
dc.contributor.author	van Dorp, Dennis
dc.contributor.imecauthor	Abrenica, Graniel
dc.contributor.imecauthor	Pacco, Antoine
dc.contributor.imecauthor	van Dorp, Dennis
dc.contributor.orcidimec	van Dorp, Dennis::0000-0002-1085-4232
dc.date.accessioned	2021-10-27T07:25:03Z
dc.date.available	2021-10-27T07:25:03Z
dc.date.issued	2019
dc.identifier.issn	1359-7345
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/32402
dc.identifier.url	https://pubs.rsc.org/en/content/articlelanding/2019/cc/c9cc05376j#!divAbstract
dc.source.beginpage	10864
dc.source.endpage	10867
dc.source.issue	73
dc.source.journal	Chemical Communications
dc.source.volume	55
dc.title	Visualizing anisotropy in the surface oxidation of germanium by wet etching of patterned nanowedges: proof of concept
dc.type	Journal article
dspace.entity.type	Publication
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