Publication:
Realization of an optical profiler: introduction to scanning probe microscopy
Date
| dc.contributor.author | Friedt, Jean-Michel | |
| dc.date.accessioned | 2021-10-15T13:29:00Z | |
| dc.date.available | 2021-10-15T13:29:00Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8929 | |
| dc.source.beginpage | 1118 | |
| dc.source.endpage | 1125 | |
| dc.source.issue | 8 | |
| dc.source.journal | American Journal of Physics | |
| dc.source.volume | 72 | |
| dc.title | Realization of an optical profiler: introduction to scanning probe microscopy | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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