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Influence of extensions implantation on selective epitaxial growth of Si used for production of FINFET raised source/drains
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1899 since deposited on 2021-10-17
2last month
Acq. date: 2026-09-14
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Views
1899 since deposited on 2021-10-17
2last month
Acq. date: 2026-09-14
Citations