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Influence of extensions implantation on selective epitaxial growth of Si used for production of FINFET raised source/drains
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Influence of extensions implantation on selective epitaxial growth of Si used for production of FINFET raised source/drains
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Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hikavyy, Andriy
;
Collaert, Nadine
;
Rooyackers, Rita
;
Leys, Frederik
;
Loo, Roger
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1891
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations
Metrics
Views
1891
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations