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Influence of extensions implantation on selective epitaxial growth of Si used for production of FINFET raised source/drains
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1892 since deposited on 2021-10-17
1last month
Acq. date: 2026-02-25
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Views
1892 since deposited on 2021-10-17
1last month
Acq. date: 2026-02-25
Citations